High-purity Titanium Carbide (TiC) sputtering targets for DC/RF magnetron deposition of ultra-hard wear-resistant coatings with hardness values reaching 28–32 GPa. TiC films combine extreme hardness with a high melting point (3160°C), high Young's modulus (~460 GPa), and good electrical conductivity (~60 µΩ·cm) — making them ideal for cutting tool protection, abrasive wear applications, and hard diffusion barriers in microelectronics.
Specifications
| Parameter | Value / Details |
|---|
| Material | Titanium Carbide (TiC) |
| Purity | 99.5% (2N5) / 99.9% (3N) |
| Film Hardness | 28–32 GPa (Vickers) |
| Melting Point | 3160 °C |
| Young's Modulus | ~460 GPa |
| Electrical Resistivity | ~60 µΩ·cm (film) |
| Relative Density | > 95% theoretical density (hot-press sintered) |
| Crystal Structure | Rock salt (cubic — NaCl type) |
| Standard Sizes | Ø 50.8 mm × 3 mm / Ø 76.2 mm × 3 mm (disc) — custom sizes available |
| Sputtering Method | DC or RF magnetron sputtering |
| Process Gas | Ar / Ar + CH₄ (stoichiometry control) |
| Film Applications | Cutting tools, abrasive wear, hard diffusion barrier, MEMS |
| Packaging | Vacuum-sealed bag + foam-padded box — ICP-OES purity certificate included |
| Bonding | Cu or In backing plate bonding available on request |
| Storage | Cool, dry — handle carefully to prevent edge chip |
| Lead Time | 3–10 days (stock) / 15–25 days (custom) |
| Customization | TiCN, TiC-TiN multilayer targets available |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Piece |
| Supply Ability | 100 Pieces Per Month |
| Delivery Time | 1–3 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Vacuum-sealed bag + foam-padded box |
| Certification | ISO 9001 — purity certificate (ICP-OES) provided |
| Storage | Cool, dry environment — reseal after use |
| Customization | Custom size, purity, shape, bonding, and alloy available |
