Miniaturised thermal evaporation system designed for operation inside a glove box — enabling metal electrode and thin film deposition under inert atmosphere without air exposure. Integrated by Virospuk.
The final step in fabricating many organic electronic devices — OLEDs, organic photovoltaics, perovskite solar cells, organic field-effect transistors — is depositing a metal top electrode. If this deposition step requires removing the substrate from the glove box, even a few seconds of air exposure at this stage can cause catastrophic interface degradation between the organic active layer and the metal contact. The correct engineering solution is to perform the metal deposition step inside the glove box, without ever breaking the inert atmosphere. This thermal evaporation coater is miniaturised specifically for in-glove-box installation, with all vacuum connections, electrical feedthroughs, and gas inlet ports designed for operation through the glove box interface.
| Parameter | Specification |
|---|---|
| Deposition technique | Resistive thermal evaporation |
| Maximum evaporation current | Up to 100 A — suitable for Al, Ag, Au, Ca, Mg, and other metals |
| Vacuum system | Integrated turbomolecular pump — operates inside glove box through sealed electrical feedthrough |
| Ultimate base pressure | ≤ 5 × 10⁻⁵ Pa inside evaporation chamber |
| Gas inlet | Needle valve for controlled inert or reactive gas introduction |
| Evaporation sources | Tungsten boat or coil; molybdenum boat optional for high-melting-point metals |
| Substrate size | Up to Ø 100 mm, glass slide, or flexible substrate |
| Film thickness control | Time-based standard; quartz crystal thickness monitor optional |
| Installation | Designed for installation inside standard glove box — all connections through sealed feedthrough panel |
| Power input | 220 V / 50 Hz via glove box electrical feedthrough |
| Certifications | CE compliant |
| Warranty | 12 months from commissioning |
Virospuk engineers will assess your glove box internal dimensions, existing feedthrough panel, and device fabrication workflow before specifying the coater installation configuration. We design and install the electrical and vacuum feedthrough connections and commission the first evaporation run inside your glove box as part of the delivery scope.
If your device fabrication workflow requires in-situ metal deposition without air break, contact our engineering team to configure this system for your glove box installation.
Your email address will not be published. Required fields are marked *
Please login to write review!
Looks like there are no reviews yet.
